Application: For fabrication of metal layer electrodes for cigs thin film cells
Base material: Glass
Equipment Advantages:
1. Modular design, can be configured according to customer needs
2. Equipped with rotating magnetic control cathode, greatly improve the equipment, the dynamic rate of the upper and lower cathode design, and complete the silicon wafer positive and negative coating
3. Configure the online crane, effectively replace the target material, reduce PM downtime
4. Perfect process gas soft isolation design, ensure gas isolation coefficient ≥100:1, while ensuring production line beat
5. Reliable software control system, equipped with MES function can be perfect docking with factory manufacturing system
6. Simple and reliable mechanism to ensure equipment stability and consistency
Application: For transparent conductive layer fabrication of hit thin film battery
Base material: Silicon wafer
Equipment Advantages:
1. Modular design, can be configured according to customer needs
2. Equipped with rotating magnetic control cathode, greatly improve the equipment, the dynamic rate of the upper and lower cathode design, and complete the silicon wafer positive and negative coating
3. Configure the online crane, effectively replace the target material, reduce PM downtime
4. Perfect process gas soft isolation design, ensure gas isolation coefficient ≥100:1, while ensuring production line beat
5. Reliable software control system, equipped with MES function can be perfect docking with factory manufacturing system
6. Simple and reliable mechanism to ensure equipment stability and consistency
