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Magnetron sputtering coating Equipment

TFT-G8.5 continuous magnetron coating system

 

Application: Suitable for the manufacture of TFT gate membrane system, d/s membrane system and pixel membrane system

Base material: Glass

Equipment Advantages:

1. Tilt cavity design to improve the stability of substrate operation

2. Configuration of the array cathode, can be achieved static coating, greatly reducing the impact of partical

3. High precision mask design to avoid the phenomenon of plating

4. Unique base frame design and wafer surface treatment, reduce product breaking rate

5. Automatic high-speed upper and lower pieces and flip-chip mechanism design, larger to improve the production beat